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Evaluation of elastic properties and temperature effects in Si thin films using an electrostatic microresonatorJEONG, Jeung-Hyun; CHUNG, Sung-Hoon; LEE, Se-Ho et al.Journal of microelectromechanical systems. 2003, Vol 12, Num 4, pp 524-530, issn 1057-7157, 7 p.Article

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A self-retracting fully compliant bistable micromechanismMASTERS, Nathan D; HOWELL, Larry L.Journal of microelectromechanical systems. 2003, Vol 12, Num 3, pp 273-280, issn 1057-7157, 8 p.Article

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A Sensitivity Approach to Force Calculation in Electrostatic MEMS DevicesMIN LI; KIM, Dong-Hun; LOWTHER, David A et al.IEEE transactions on magnetics. 2008, Vol 44, Num 6, pp 1610-1613, issn 0018-9464, 4 p.Conference Paper

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